Effect of Residual Stress on CSRR Based RF MEMS Filter

Pradhan, Buddhadev; Gupta, Bhaskar

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DC Field	Value	Language
dc.contributor.author	Pradhan, Buddhadev
dc.contributor.author	Gupta, Bhaskar
dc.date.accessioned	2016-12-22T17:37:15Z	-
dc.date.available	2016-12-22T17:37:15Z	-
dc.date.issued	2014-03-27
dc.identifier.issn	0972-8791
dc.identifier.uri	http://inet.vidyasagar.ac.in:8080/jspui/handle/123456789/896	-
dc.description	76-82	en_US
dc.description.abstract	Effects of residual stress on the electromechanical characteristic of a CSRRs based band reject filter are presented. Realization of such a filter has previously been reported by the authors, [1] neglecting the effect of residual stress on MEMS beam. This paper presents electromechanical simulated results as well as theoretically calculated results with consideration of residual stress effect. Residual stress performance is calculated with respect to actuation voltage and spring constant of fixed-fixed gold metallic beam. It is apparent that the effects of residual stress are quite significant which should be taken into account for all such analysis	en_US
dc.language.iso	en_US	en_US
dc.publisher	Vidyasagar University , Midnapore , West-Bengal , India	en_US
dc.relation.ispartofseries	Journal of Physical Science;18
dc.subject	CSRRs Filter	en_US
dc.subject	MEMS	en_US
dc.subject	Residual Stress	en_US
dc.subject	Electro- mechanical analysis	en_US
dc.title	Effect of Residual Stress on CSRR Based RF MEMS Filter	en_US
dc.type	Article	en_US
Appears in Collections:	Journal of Physical Sciences Vol.18 [2014] - [Special Issue : Communication, Device, Information and Intelligence Systems]

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