A Study on Effect of Error Field on Toroidal Discharge in Air

Abstract

Breakdown threshold voltage of an electrode less toroidal discharge has been studied using H- type solenoid coil excited by a 13.56 MHz radio frequency power in absence and in presence of a toroidal error field with different pressures, and axial magnetic field for dry air. The breakdown threshold depends on various filling parameters e.g. error field , and magnetic field. Again the floating double probe technique was used to measure the plasma temperature and density in presence of error field using the equivalent resistance method [1,2,3,4,5] for dry air. all measurements were made in a 13.56 mhz inductively coupled radio frequency plasma discharge at different pressures ranging from 0.07 torr to 0.20 torr and magnetic field was varied between 0g to 75g.